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Tris(dimethylamino)silane CAS 15112-89-7

Tris(dimethylamino)silane CAS 15112-89-7

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Identification

CAS Number

15112-89-7

Name

Tris(dimethylamino)silane

Synonyms

(Me2N)3SiH
15112-89-7 [RN]
239-165-0 [EINECS]
MFCD00048006
N,N,N’,N’,N”, N”-Hexamethylsilanetriamine
N,N,N’,N’,N”,N”-Hexamethylsilanetriamine [ACD/IUPAC Name]
N,N,N’,N’,N”,N”-Hexaméthylsilanetriamine [French] [ACD/IUPAC Name]
N,N,N’,N’,N”,N”-Hexamethylsilantriamin [German] [ACD/IUPAC Name]
Silanetriamine, N,N,N’,N’,N”,N”-hexamethyl- [ACD/Index Name]
TDMAS
Tris(dimethylamido)silane
Tris(dimethylamino)silane
VV5800000
[BIS(DIMETHYLAMINO)SILYL]DIMETHYLAMINE
3dmas : [(ch3)2n]3sih
99715-91-0 [RN]
N-[bis(dimethylamino)silyl]-N-methylmethanamine
Tris (dimethylamino ) silane
TRIS SILANE
tris(dimethylamino)silicon

SMILES

CN(C)[SiH](N(C)C)N(C)C

StdInChI

InChI=1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3

StdInChIKey

TWVSWDVJBJKDAA-UHFFFAOYSA-N

Molecular Formula

C6H19N3Si

Molecular Weight

161.321

EINECS

239-165-0

MDL Number

MFCD00048006

Properties

Appearance

Colorless liquid

Structure

Structure of Tris(dimethylamino)silane CAS 15112-89-7

Structure of Tris(dimethylamino)silane CAS 15112-89-7

Safety Data

Symbol

exclamation-mark-jpgGHS02,GHS05, GHS06

Signal Word

Warning

Hazard statements

H225 – H261 – H302 – H311 – H314 – H330

Precautionary Statements

P210 – P231 + P232 – P280 – P303 + P361 + P353 – P304 + P340 + P310 – P305 + P351 + P338

WGK Germany

3

MSDS Download

Specifications and Other Information of Our

Identification Methods

HNMR, HPLC

Purity

99.9+%(99.9999%-si)

Metal ion

<10ppb

Chlorine ion

<1ppm

Shelf Life

1 year

Storage

Under room temperature away from light

Productivity

1MT/month

Known Application

Tris(dimethylamino)silane be used as a CVD precursor material for the deposition of thin film materials such as silicon oxide, silicon nitride, and more. This is crucial in semiconductor manufacturing and thin-film coating processes. And serves as a precursor for organosilicon polymers, which are used to create high-performance silicone materials known for their excellent heat and chemical resistance. These materials find applications in coatings, sealants, adhesives, and more.

Tris(dimethylamino)silane can be employed to modify the surface properties of materials, enhancing their wetting, adhesion, and chemical resistance. This is widely used in the manufacturing of coatings, wallpaper coatings, plastics, and other products.

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